Plasma-Surface Interactions and Processing of Materials: Proceedings (
Nato Science Series E:, Band 176) | O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm | ISBN: 9780792305842 | Kostenloser Versand für alle Bücher mit Versand und Verkauf duch Amazon. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
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